More error checks in Tramp's make-directory

* lisp/net/tramp-adb.el (tramp-adb-handle-make-directory):
* lisp/net/tramp-gvfs.el (tramp-gvfs-handle-make-directory):
* lisp/net/tramp-sh.el (tramp-sh-handle-make-directory):
* lisp/net/tramp-smb.el (tramp-smb-handle-make-directory):
* lisp/net/tramp-sudoedit.el (tramp-sudoedit-handle-make-directory):
Signal `file-already-exists' if DIR exists.

* test/lisp/net/tramp-tests.el (tramp-test04-substitute-in-file-name):
Fix thinko.
(tramp-test13-make-directory, tramp-test14-delete-directory)
(tramp-test15-copy-directory): Extend tests.
2 jobs for master in 65 minutes and 9 seconds (queued for 4 seconds)
Status Job ID Name Coverage
  Test
failed #4127
test-all

01:05:09

passed #4128
test-filenotify-gio

00:41:49

 
Name Stage Failure
failed
test-all Test
Makefile:319: recipe for target 'check-doit' failed
make[2]: *** [check-doit] Error 1
make[2]: Leaving directory '/builds/emacs/emacs/test'
Makefile:294: recipe for target 'check-expensive' failed
make[1]: Leaving directory '/builds/emacs/emacs/test'
Makefile:959: recipe for target 'check-expensive' failed
make[1]: *** [check-expensive] Error 2
make: *** [check-expensive] Error 2
ERROR: Job failed: exit code 1